Andam Deatama Refino, Calvin Eldona, Rahmandhika Firdauzha Hary Hernandha, Egy Adhitama, Afriyanti Sumboja, Erwin Peiner, Hutomo Suryo Wasisto
Miniaturization of modern microelectronics to accommodate the development of portable and smart devices requires independent energy storage that is compact, lightweight, reliable, and integrable on-chip. Three-dimensional lithium-ion microbatteries are considered as promising candidates to fill the role, owing to their high energy and power density. Combined with silicon as a high-capacity anode material, the performance of the microbatteries can be further enhanced. In this review, the latest developments in three-dimensional silicon-based lithium-ion microbatteries are discussed in terms of material compatibility, cell designs, fabrication methods, and performance in various applications. We highlight the relation between device architecture and performance as well as comparison between different fabrication technologies. Finally, we suggest possible future studies based on the current development status to provide a research direction towards further improved three-dimensional silicon-based lithium-ion microbatteries. © The Author(s) 2024.
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Hans-Sommer-Straße 66, Braunschweig, 38106, Germany; Engineering Physics Program, Institut Teknologi Sumatera (ITERA), Jl. Terusan Ryacudu, Way Huwi, Lampung Selatan, Lampung, 35365, Indonesia; School of Materials Science and Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore, 639798, Singapore; Department of Materials Science and Engineering, National Yang-Ming Chiao Tung University, 1001 University Road, Hsinchu, 30010, Taiwan; University of Münster, MEET Battery Research Center, Institute of Physical Chemistry, Corrensstr. 46, Münster, 48149, Germany; University of Münster, International Graduate School for Battery Chemistry, Characterization, Analysis, Recycling and Application (BACCARA), Corrensstr. 40, Münster, 48149, Germany; Material Science and Engineering Research Group, Faculty of Mechanical and Aerospace Engineering, Institut Teknologi Bandung, Jl. Ganesha 10, Bandung, 40132, Indonesia; Research Collaboration Center for Advanced Energy Materials, Institut Teknologi Bandung, Jl. Ganesha 10, Bandung, 40132, Indonesia; PT Nanosense Instrument Indonesia, Umbulharjo, Yogyakarta, 55167, Indonesia